DOSSIER · 13F Holders · Q1 2026Technology · Special Industry Machinery, NECCheap mega-capRe-rated
ACLS
AXCELIS TECHNOLOGIES INC
392 institutions still hold AXCELIS TECHNOLOGIES INC as of Q1 2026. Tracked across SEC 13F-HR filings, with insider and 13D/G activity surfaced alongside.
CUSIP 054540208·Special Industry Machinery, NEC·392 13F holders·last filed Mar 31, 2026
AI Holders Summary · Q1 2026
392 institutions reported ACLS in Q1 2026. BlackRock, Inc. leads at 20.4% of the visible book. +107 net new institutions vs prior quarter — accumulation reading.
Top holders
Sorted by position value. Source: SEC EDGAR 13F-HR filings.
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