DOSSIER · 13F Holders · Q1 2026Technology · Special Industry Machinery, NEC
ACLS

AXCELIS TECHNOLOGIES INC

410 institutions still hold AXCELIS TECHNOLOGIES INC as of Q1 2026. Tracked across SEC 13F-HR filings, with insider and 13D/G activity surfaced alongside.

CUSIP 054540208·Special Industry Machinery, NEC·410 13F holders·last filed Mar 31, 2026
Market cap
13F value held
$2.3B
visible holders
Holders
410
filers reporting
Concentration
19.88%
BlackRock, Inc. #1
top holder share
AI Holders Summary · Q1 2026

410 institutions reported ACLS in Q1 2026. BlackRock, Inc. leads at 19.9% of the visible book.

Top holders

Sorted by position value. Source: SEC EDGAR 13F-HR filings.

#HolderValueShares% port.Quarter
01
BlackRock, Inc.
CIK 0002012383
$460M4.9M0.01%Q1 2026
02
Vanguard Portfolio Management
CIK 0002100121· Index
$232M2.5M0.01%Q1 2026
03
FMR LLC
CIK 0000315066
$226M2.4M0.01%Q1 2026
04
REINHART PARTNERS, LLC.
CIK 0001080298
$176M929K4.02%Q2 2026
05
VANGUARD CAPITAL MANAGEMENT LLC
CIK 0002100119· Index
$129M1.4M0.00%Q1 2026
06
BALYASNY ASSET MANAGEMENT L.P.
CIK 0001218710
$127M1.4M0.16%Q1 2026
07
VICTORY CAPITAL MANAGEMENT INC
CIK 0001040188
$119M1.3M0.08%Q1 2026
08
STATE STREET CORP
CIK 0000093751
$111M1.2M0.00%Q1 2026
09
BNP Paribas Asset Management Holding S.A.
CIK 0001520354
$94M1.0M0.11%Q1 2026
10
AMERICAN CENTURY COMPANIES INC
CIK 0000748054
$89M952K0.05%Q1 2026
11
DIMENSIONAL FUND ADVISORS LP
CIK 0000354204· Quasi-passive
$79M844K0.02%Q1 2026
12
GEODE CAPITAL MANAGEMENT, LLC
CIK 0001214717· Index
$76M811K0.00%Q1 2026
13
Boston Trust Walden Corp
CIK 0001534866
$68M359K0.52%Q2 2026
14
PRIMECAP MANAGEMENT CO/CA/
CIK 0000763212
$61M659K0.05%Q1 2026
15
MORGAN STANLEY
CIK 0000895421
$54M582K0.00%Q1 2026
16
GOLDMAN SACHS GROUP INC
CIK 0000886982
$46M498K0.01%Q1 2026
17
MANUFACTURERS LIFE INSURANCE COMPANY, THE
CIK 0000928047
$46M492K0.04%Q1 2026
18
CHARLES SCHWAB INVESTMENT MANAGEMENT INC
CIK 0000884546· Index
$41M446K0.01%Q1 2026
19
LSV ASSET MANAGEMENT
CIK 0001050470
$40M430K0.09%Q1 2026
20
NORTHERN TRUST CORP
CIK 0000073124· Index
$39M417K0.01%Q1 2026
Page 1 of 21
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Insiders at AXCELIS TECHNOLOGIES INC
Ryzhik DavidBlumenstock Gerald MSayiner NecipMahoney Robert JohnSutton ToddSt Dennis ThomasEvans EileenTatnall Christopher